Monolithically integrated photonic lab-on-a-chip platform for biological applications

Contributed by

Homann Clemens

Authors

I.Raptisa, E. Makaronaa, P. Petroub, S. Kakabakosb, K. Misiakosa

Abstract

The biological and chemical optical sensors that are based on integrated waveguides require external active optical components resulting in operational complexity. To overcome these limitations, a breakthrough photonic lab-on-a-chip platform, has been developed comprising planar waveguides self-aligned to VIS-NIR light-sources, and detectors, all monolithically integrated on the same silicon chip and fabricated with standard microelectronic/micromachining processes. This versatile optoelectronic platform can be applied equally well to monolithically integrated interferometric and optomechanical sensors outpassing in performance the state-of-the art devices. An overview of the fabrication aspects and particular applications for label-free optical detection of biological species are presented.

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