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Supported by

   Supported by the EU     Seventh Framework Program

WYKO NT-2000 non-contact optical profiler

Category: Fabrication and enabling technologies, Type: Fabrication

Currently viewing version 2

Name

WYKO NT-2000 non-contact optical profiler

Description

We provide a commercial non-contact optical profiler (WYKO NT-2000, Veeco) based on a Mirau interference microscope. The measurand is a contour plot containing the surface information of the sample under test. Software algorithms allow to determine different surface roughnesses, geometrical dimensions of elements (heights, widths, distances,) and systems; The data from the measurements can be used as input in specific design and modeling software tools.

Schemes and typical results

Typical results: Typical results are contour plots of micro-lenses and surface topography maps for determination of different surface roughness parameters. The data output format is a proprietary opd file (*.opd), but which can be easily exported with Matlab to other file formats, like ascii

Special features and limitations

This surface profiler system uses two approaches to measure a wide range of surface heights. The phase-shifting interferometry (PSI) mode allows measuring fairly smooth and continuous surfaces (0.1 nm < heights < 160 nm) while the vertical scanning interferometry (VSI) mode can measure rough surfaces and heights ranging between 160 nm and 2 mm.

Publications

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Expert(s)

Ottevaere Heidi , Van Erps J├╝rgen

Fixed keywords

Fabrication and enabling technologies

Free keywords

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Version history

# Author Date Actions
3 Vervaeke Michael 2010-01-12 14:56 View
2 Debaes Nathalie 2010-01-12 14:13
1 Debaes Nathalie 2010-01-12 14:10 View

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