Category: Fabrication and enabling technologies, Type: Fabrication
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NameWYKO NT-2000 non-contact optical profiler
We provide a commercial non-contact optical profiler (WYKO NT-2000, Veeco) based on a Mirau interference microscope. The measurand is a contour plot containing the surface information of the sample under test. Software algorithms allow to determine different surface roughnesses, geometrical dimensions of elements (heights, widths, distances,) and systems; The data from the measurements can be used as input in specific design and modeling software tools.
Schemes and typical results
Typical results: Typical results are contour plots of micro-lenses and surface topography maps for determination of different surface roughness parameters. The data output format is a proprietary opd file (*.opd), but which can be easily exported with Matlab to other file formats, like ascii
Special features and limitations
This surface profiler system uses two approaches to measure a wide range of surface heights. The phase-shifting interferometry (PSI) mode allows measuring fairly smooth and continuous surfaces (0.1 nm < heights < 160 nm) while the vertical scanning interferometry (VSI) mode can measure rough surfaces and heights ranging between 160 nm and 2 mm.
What equipment do you use?
Which different components can be fabricated?
What is the functionality of each component?
What applications could it serve?
Expert(s)Ottevaere Heidi , Van Erps Jürgen
|3||Vervaeke Michael||2010-01-12 14:56||View|
|2||Debaes Nathalie||2010-01-12 14:13|
|1||Debaes Nathalie||2010-01-12 14:10||View|
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